This paper concentrates on the wave motion at the interface of viscous compressible fluid half-space and homogeneous isotropic, generalized thermoelastic diffusive half-space. The wave solutions in both the fluid and thermoelastic diffusive half-spaces have been investigated; and the complex dispersion equation of leaky Rayleigh wave motion have been derived. The phase velocity and attenuation coefficient of leaky Rayleigh waves have been computed from the complex dispersion equation by using the Muller's method. The amplitudes of displacements, temperature change and concentration have been obtained. The effects of viscosity and diffusion on phase velocity and attenuation coefficient of leaky Rayleigh waves motion for different theories of thermoelastic diffusion have been depicted graphically. The magnitude of heat and mass diffusion flux vectors for different theories of thermoelastic diffusion have also been computed and represented graphically.